Exposure apparatus and device fabrication method

Details Exposure apparatus and device fabrication method Exposure apparatus and device fabrication method

2005-09-21

2008-12-30

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S067000, C355S071000, C378S034000, C250S492200

Reexamination Certificate

active

07471371

ABSTRACT:
This exposure system projects a pattern image onto a substrate via a projection optical system and a liquid to expose the substrate, with a space between the projection optical system and the substrate filled with the liquid. The exposure system is provided with a vaporization preventing unit for preventing the vaporization of the liquid.

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