Exposure apparatus and alignment discrimination method

Details Exposure apparatus and alignment discrimination method Exposure apparatus and alignment discrimination method

1996-08-23

1998-06-02

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 77, 356399, 356400, 356401, G03B 2742, G03B 2732, G01B 1100

Patent

active

057608784

ABSTRACT:
A discrimination apparatus and method usable in an exposure apparatus for transferring a pattern of an original onto a substrate includes a device and step for producing information related to the relative positional deviation between the original and the substrate, and a device and step for discriminating an error shot on the basis of the information. The condition for positioning discrimination is changed in accordance with a layer or shot.

REFERENCES:
patent: 4595282 (1986-06-01), Takahashi
patent: 5532822 (1996-07-01), Shinozaki et al.
patent: 5539497 (1996-07-01), Nishi
patent: 5633720 (1997-05-01), Takahashi

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