Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-02-07
2006-02-07
Nguyen, Judy (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S055000
Reexamination Certificate
active
06995828
ABSTRACT:
An exposure apparatus including a barometer for detecting air pressure, a lens driving unit for driving a lens of a projection optical system, a light-source-wavelength changing unit for changing a wavelength of an exposure light source, and a stage driving unit for driving a wafer stage in an optical-axis direction. The apparatus can correct an aberration caused by a change in air pressure by utilizing the lens driving unit, the light-source-wavelength changing unit, and the stage driving unit. During a shot of an exposure of the exposure apparatus, the lens driving unit and/or the stage driving unit are employed to correct the aberration. In the non-exposure state (shot interval), the light-source-wavelength changing unit and/or the lens driving unit as well as the stage driving unit are employed to correct the aberration.
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Gutierrez Kevin
Nguyen Judy
LandOfFree
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