Exposure apparatus

Details Exposure apparatus Exposure apparatus

2008-06-24

2008-06-24

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S072000, C310S012060, C310S016000, C318S135000

Reexamination Certificate

active

07391496

ABSTRACT:
An exposure apparatus which exposes a substrate to a pattern. The apparatus includes a channel which causes pure water to flow as a coolant, a temperature adjustment unit which adjusts a temperature of the coolant flowing in the channel, and a UV sterilization unit which performs UV sterilization processing for the coolant flowing in the channel.

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