Exposure apparatus

Details Exposure apparatus Exposure apparatus

2011-07-19

2011-07-19

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S072000, C355S073000

Reexamination Certificate

active

07982849

ABSTRACT:
An exposure apparatus including a moving member movable with a substrate, an interferometer configured to measure a position of the moving member, a blower device for blowing temperature-conditioned air, a plurality of supply openings communicating with the blower device, and a flow rate adjusting device configured to adjust a gas flow rate blown through the plurality of supply openings based on an operation of the moving member.

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