Exposure apparatus

Details Exposure apparatus Exposure apparatus

2011-06-07

2011-06-07

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000

Reexamination Certificate

active

07956985

ABSTRACT:
An exposure apparatus includes a driver used for one of height, inclination, curvature-of-field, magnification, and rotation corrections, and a controller configured to control a substrate stage so that it can change an exposure area from a first shot to a third shot even if a moving distance of the substrate stage from the first shot to the second shot is smaller than that from the first shot to the third shot, if a time period necessary for the driver to transfer from a correction state for the first shot to a correction state for the second shot is longer than a time period necessary for the substrate stage to move the exposure area from the first shot to the second shot, and a time period necessary for the driver to transfer from a correction state for the first shot to a correction state for the third shot.

REFERENCES:
patent: 5337247 (1994-08-01), Hamaguchi
patent: 6163366 (2000-12-01), Okamoto et al.
patent: 6342942 (2002-01-01), Uzawa
patent: 6674509 (2004-01-01), Suzuki
patent: 7446853 (2008-11-01), Fukuhara et al.
patent: 04-037114 (1992-02-01), None

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