Exposure apparatus

Details Exposure apparatus Exposure apparatus

1995-10-27

1997-05-27

Smith, Matthew S.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, 355 55, 355 73, H01L 2130, G03B 2758, G03B 2742

Patent

active

056336985

ABSTRACT:
An exposure apparatus comprises a substrate holding portion for holding a photosensitive substrate including a surface, a substrate stage for two-dimensional positioning of the photosensitive substrate via the substrate holding portion, the substrate stage including an upper surface, and an exposure system for transferring a pattern on a mask to the photosensitive substrate by an exposing illumination light. The substrate holding portion is provided in the substrate stage so that the portion of the upper surface of the substrate stage surrounding the photosensitive substrate is substantially flush with the surface of the photosensitive substrate.

REFERENCES:
patent: 4650983 (1987-03-01), Suwa
patent: 4786947 (1988-11-01), Kosugi et al.
patent: 5383217 (1995-01-01), Uemura
patent: 5392120 (1995-02-01), Kamiya
patent: 5550633 (1996-08-01), Kamiya
patent: 5569930 (1996-10-01), Imai

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