Exposure apparatus

Details Exposure apparatus Exposure apparatus

1988-10-18

1990-02-27

Hix, L. T.

Photocopying

Projection printing and copying cameras

Step and repeat

355 68, 353122, G03B 2742

Patent

active

049050419

ABSTRACT:
An exposure apparatus for exposing, to a pattern of a first object, a second object by use of light is disclosed. The apparatus includes a light source for supplying light having a predetermined wavelength, for exposing the second object to the pattern of the first object, a detecting device for detecting a change in the wavelength of the light from the light source, and a control device operable in response to a signal from the detecting device, to bring the second object substantially unexposed to the pattern of the first object.

REFERENCES:
patent: 4553834 (1985-11-01), Ayata et al.
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4773750 (1988-09-01), Bruning

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