Exposure apparatus

Details Exposure apparatus Exposure apparatus

1983-11-18

1986-04-22

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

355 53, 355 55, 355 67, G03B 2752

Patent

active

045838402

ABSTRACT:
An exposure apparatus includes an original stage for holding an original, a stage holding and moving a radiation sensitive member, a projection optical system for projecting the image of the original onto the radiation sensitive member, a device for illuminating the original, and a device for supplying heat to the projection optical system to maintain the imaging position of the projection optical system when no exposure operation is effected.

REFERENCES:
patent: 4202623 (1980-05-01), Watkin
patent: 4432635 (1984-02-01), Mayer
patent: 4496239 (1985-01-01), Isohata et al.
patent: 4503335 (1985-03-01), Takahashi et al.

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