Exposure apparatus

Details Exposure apparatus Exposure apparatus

1988-06-14

1989-10-17

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 30, 355 77, G03B 2742

Patent

active

048750760

ABSTRACT:
Step-and-repeat exposure apparatus for printing, by way of a projection optical system, images of a pattern formed on a reticle upon different portions of a semiconductor wafer, placed on a movable stage, is disclosed. On the portion of the movable stage other than the portion upon which the semiconductor wafer is placed, an erasably writable recording medium such as, for example, a magneto-optic recording material or a photochromic material is provided. An image of a mark of a reticle is formed on the recording medium by use of the projection optical system, the thus formed image being photoelectrically detected. From the result of the detection, alignment information concerning, for example, a magnification error, a focus error, a positional error between the reticle and the wafer, for example is obtained.

REFERENCES:
patent: 4395117 (1983-07-01), Suzuki
patent: 4506977 (1985-03-01), Sato et al.
patent: 4597664 (1986-07-01), Johannsmeier et al.
patent: 4629313 (1986-12-01), Tanimoto
patent: 4645924 (1987-02-01), Suzuki et al.

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