Exposure apparatus

Details Exposure apparatus Exposure apparatus

1985-02-27

1986-05-06

Perkey, William B.

350432, G03B 4100, G02B 1318

Patent

active

045867992

ABSTRACT:
In an exposure apparatus of the type in which a light source, formed by fixing a light emitting tube, housed uner a cover except a partial opening, inside a lamp housing filled with cooling water, is disposed in such a fashion that the opening faces an exposed surface via a transparent faceplate of the lamp housing and the light source is rotatable with the center axis of the exposed surface, perpendicular thereto, being the axis of rotation, the invention discloses an exposure apparatus wherein the faceplate of the lamp housing consists of a saddle-shaped lens having a concave surface in the radial direction of the light emitting tube and a convex surface in the axial direction. Ths exposure apparatus reduces the apparent movement of the light source with the rotation of the light source portion, and can improved exposure accuracy.

REFERENCES:
patent: 4187013 (1980-02-01), Fujimura et al.
patent: 4206986 (1980-06-01), Kotoyori
patent: 4414565 (1983-11-01), Shanks

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