Exposure apparatus

Details Exposure apparatus Exposure apparatus

1997-07-31

1999-01-26

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

355 53, 356400, 356401, G03B 2742, G03B 2752, G01B 902

Patent

active

058643869

ABSTRACT:
An exposure apparatus includes a stage, a table mounted on the stage and having a fiduciary mark and a moving mirror, a holder mounted on the stage for holding a substrate, and a temperature control system for regulating heat transfer to the moving mirror and the fiduciary mark and installed in the holder and the table.

REFERENCES:
patent: 4989031 (1991-01-01), Kamiya
patent: 5469260 (1995-11-01), Takagi et al.
patent: 5569930 (1996-10-01), Imai
patent: 5796469 (1998-08-01), Ebinuma

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