Exposure apparatus

Details Exposure apparatus Exposure apparatus

1997-10-15

1998-08-25

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

2504911, 2504922, 355 55, 378 35, 378206, 378207, 356363, G03G 2742, G01B 1100

Patent

active

057988226

ABSTRACT:
A pair of reference plates is so arranged as to have a predetermined positional relationship on a carriage that integrally holds a mask and a photosensitive substrate such that the mask and the photosensitive substrate oppose each other on two sides of a projecting optical system. By periodically detecting the positional relationship between the reference plates in the optical axis direction, a variation with time occurring in the detection characteristics of position detecting devices is detected. Both stable image formation characteristics and a high throughput are realized by correcting a driving signal to be supplied to a driving device in accordance with the detected variation.

REFERENCES:
patent: 5523574 (1996-06-01), Hamada et al.
patent: 5528027 (1996-06-01), Mizutani

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