Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-06-23
2010-06-08
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07733461
ABSTRACT:
An exposure apparatus includes an illumination optical system for illuminating a reticle with exposure light, a projection optical system for projecting a pattern of the reticle onto a plate via a liquid supplied to a space between the projection optical system and the plate, a supply pipe for supplying the liquid to the space, a recovery pipe for recovering the liquid from the space, and a measuring unit for measuring a refractive index of the liquid. The measuring unit includes (i) a light source for generating a measurement light having the same wavelength as that of the exposure light, (ii) a liquid reservoir for storing the liquid, the liquid reservoir being disposed apart from the space via the supply pipe or the recovery pipe, and having a transmitting surface for transmitting the measurement light and a reflecting surface for reflecting the measurement light transmitted by the transmitting surface and the liquid in the reservoir, and (iii) a detector for detecting the measurement light reflected on the reflecting surface and transmitted by the liquid in the liquid reservoir and the transmitting surface.
REFERENCES:
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patent: 6024428 (2000-02-01), Uchikata
patent: 6661522 (2003-12-01), Ouchi
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patent: 2004-301825 (2004-10-01), None
Asfaw Mesfin T
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Glick Edward J
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