Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2007-06-18
2009-06-23
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S075000
Reexamination Certificate
active
07551264
ABSTRACT:
Two independent fine adjustment stages are arranged on one coarse adjustment stage to simultaneously perform all of focus measurement and part of alignment measurement in parallel with an exposure operation. A method of transporting a wafer together with a chuck is adopted as a precondition. Alignment of a pattern on a wafer with a chuck is performed before the chuck is mounted on each fine adjustment stage.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Nguyen Hung Henry
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