Exposure apparatus

Details Exposure apparatus Exposure apparatus

2006-01-04

2008-10-21

Lee, Diane I. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

07440077

ABSTRACT:
The exposure apparatus of the invention includes a chamber1housing an exposure apparatus body6provided with an illumination optical system2, a reticle3, a projection lens4and a stage5, gas supply units7, 13, 17and18that are disposed in the chamber1and supply gas taken in from the outside of the chamber1to the vicinities of the reticle3and stage5and a wet filter10which is disposed in the vicinity of a gas intake8from which the gas is supplied to the gas supply units7, 13, 17and18and forms a water film through which the gas passes.

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patent: 6356338 (2002-03-01), Arakawa
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patent: 2006/0156927 (2006-07-01), Udagawa et al.
patent: 0 879 997 (1998-11-01), None
patent: 2000-058433 (2000-02-01), None
patent: WO 2004/099678 (2004-11-01), None
patent: WO 2004/108252 (2004-12-01), None

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