Exposure apparatus

Details Exposure apparatus Exposure apparatus

2007-10-23

2007-10-23

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C250S492100, C250S492200

Reexamination Certificate

active

11552958

ABSTRACT:
An exposure apparatus includes an illumination optical system that includes an optical integrator for forming a secondary light source from the light, and a variable stop arranged at or near a position where the secondary light source is formed, the diameter variable stop that defines a NA of the illumination optical system, a projection optical system that includes an aperture stop arranged at a position substantially optically conjugate with the variable stop, the aperture stop defining a numerical aperture of the projection optical system, and a controller for controlling the aperture diameter of the variable stop as the aperture diameter varies so that an image of the secondary light source can fall within the aperture diameter of the aperture stop.

REFERENCES:
patent: 5245384 (1993-09-01), Mori
patent: 5363172 (1994-11-01), Tokuda
patent: 6717651 (2004-04-01), Kato et al.
patent: 2004/0125459 (2004-07-01), Tanitsu et al.
patent: 5-299321 (1993-11-01), None

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