Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-06-26
2007-06-26
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000, C355S075000, C378S034000
Reexamination Certificate
active
10880525
ABSTRACT:
An exposure apparatus includes a projection device for projecting a pattern drawn on a surface of a master, a stage apparatus which moves at least a substrate of the master and a substrate relative to the projection device, and an exposure device for repeatedly exposing the substrate to the pattern of the master. A plurality of pipes connected to movable units of the stage apparatus are joined to each other at partial outer surfaces of the pipes and constitute an integrated pipe array. Electrical cables or signal line cables connected to the movable unit pass through hollow portions of some of the pipes serving as the integrated pipe array.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Rutledge D.
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