Exposure apparatus

Details Exposure apparatus Exposure apparatus

2007-07-17

2007-07-17

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000, C355S075000

Reexamination Certificate

active

11611386

ABSTRACT:
An exposure apparatus includes a vacuum chamber, a load-lock chamber disposed between the vacuum chamber and outside the exposure apparatus, a reticle cassette configured to hold a reticle, a conveying unit configured to convey the reticle cassette between the vacuum chamber and the load-lock chamber, and an opening and closing unit configured to open and close the reticle cassette. The opening and closing unit is disposed within the vacuum chamber.

REFERENCES:
patent: 5559584 (1996-09-01), Miyaji et al.
patent: 6829038 (2004-12-01), Miwa
patent: 6948619 (2005-09-01), Su et al.
patent: 7196769 (2007-03-01), Miyajima
patent: 2005/0095829 (2005-05-01), Shinichi
patent: 10-261560 (1998-09-01), None
patent: 2005-123292 (2005-05-01), None

Affiliated with

Also associated with

Rating

Exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3799642