Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Patent
1996-09-03
1999-03-02
Moses, R. L.
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
355 53, 355 55, G03B 2742, G03B 2752
Patent
active
058778438
ABSTRACT:
A scanning type exposure apparatus, which is used to expose a wafer with an image of a pattern on a reticle by synchronously moving the reticle and the wafer, comprises a second gas conditioner for circulating a temperature-controlled gas in a subsidiary chamber which encloses an optical path of an interferometer for measuring a position of a reticle stage. The apparatus comprises a third gas conditioner for supplying a temperature-controlled gas to an internal space of a pedestal including a wafer stage and an optical path of an interferometer for measuring a position of the wafer stage. A positional error of the stage, which would be otherwise caused by temperature-dependent fluctuation of the gas on the optical path of the interferometer, is reduced. A heat insulating material is installed on a top plate of the pedestal so as to intercept heat transfer from a heat source on the pedestal to the internal space of the pedestal. A tube may be arranged in the pedestal so that a temperature of the pedestal is adjusted by allowing a temperature-controlled fluid to flow therethrough.
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Iwata Naohiko
Takagi Shin-ichi
Moses R. L.
Nikon Corporation
Virmani Shival P.
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