Exposure apparatus

Details Exposure apparatus Exposure apparatus

2007-03-20

2007-03-20

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000, C356S401000

Reexamination Certificate

active

11011570

ABSTRACT:
An exposure apparatus includes a projection optical system for projecting a pattern on a reticle mounted on a first stage onto an object mounted on a second stage, a first reference plate provided on the reticle or a surface equivalent to the reticle, the first reference plate having three or more first reference marks each of which serves as a reference for an alignment between the reticle and the object, a measuring unit for measuring focus position at imaging positions of the first reference marks and for measuring an image surface of the projection optical system, and a correcting unit for correcting a relationship between the image surface and a reference surface as a reference of a measurement by the measuring unit.

REFERENCES:
patent: 5286963 (1994-02-01), Torigoe
patent: 6023320 (2000-02-01), Kawashima
patent: 2002/0145716 (2002-10-01), Kurosawa
patent: 5-45889 (1993-02-01), None

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