Exposure apparatus

Details Exposure apparatus Exposure apparatus

2006-06-27

2006-06-27

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000, C355S067000

Reexamination Certificate

active

07068352

ABSTRACT:
An exposure apparatus for scanning and exposing an object includes a surrounding member for surrounding a space around the object, and a gas supplier for supplying a gas to the space in two directions which are substantially parallel to a scanning direction.

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patent: 2002/0000519 (2002-01-01), Tsukamoto
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patent: 4-365050 (1992-12-01), None
patent: 8-279458 (1996-10-01), None
patent: 2001-118783 (2001-04-01), None

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