Exposure apparatus

Details Exposure apparatus Exposure apparatus

2006-04-11

2006-04-11

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000

Reexamination Certificate

active

07027131

ABSTRACT:
An exposure apparatus includes an optical system for guiding light from a light source to an object, a holding member for holding the object, and a measuring device for measuring position of the holding member by using a reference surface provided in the holding member, wherein the reference surface is located in an area corresponding to the object which is held by the holding member.

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patent: 2000-206279 (2000-07-01), None
patent: 2001-195130 (2001-07-01), None

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