Exposure apparatus

Details Exposure apparatus Exposure apparatus

2006-05-23

2006-05-23

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

07050152

ABSTRACT:
An exposure apparatus for exposing an object put on a first stage by irradiating light from a light source onto the object through an exposure optical system includes a partition for isolating a first space where the first stage is arranged and isolating a second space where the exposure optical system is arranged, a first management part that manages a degree of vacuum of the first space, and a second management part that manages a degree of vacuum of the second space.

REFERENCES:
patent: 6198792 (2001-03-01), Kanouff et al.
patent: 6333775 (2001-12-01), Haney et al.
patent: 6707529 (2004-03-01), Aoki et al.
patent: 6791661 (2004-09-01), Sato
patent: 6842221 (2005-01-01), Shiraishi
patent: 7-263322 (1995-10-01), None
patent: 2002-529927 (2002-09-01), None
patent: 00/28384 (2000-05-01), None

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