Exposure apparatus

Details Exposure apparatus Exposure apparatus

2005-04-19

2005-04-19

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

06882407

ABSTRACT:
An exposure apparatus which has a light source and transfers a pattern of an original to a substrate using light supplied from the light source includes a photoelectric sensor used to control an amount of light to which the substrate is exposed, a memory storing a first value for correcting an output value of the photoelectric sensor with respect to each accumulated energy of light, having a first power, with which the photoelectric sensor is irradiated, a calculator which calculates a second value for correcting an output value of the photoelectric sensor corresponding to a second accumulated energy of light, having a second power, with which the photoelectric sensor is irradiated, based on the first value in the memory corresponding to the second accumulated energy, and a ratio of the second power to the first power, and a correction unit which corrects an output value of said photoelectric sensor using the second value.

REFERENCES:
patent: 5581324 (1996-12-01), Miyai et al.
patent: 5894341 (1999-04-01), Nishi et al.
patent: 6259510 (2001-07-01), Suzuki
patent: 6744492 (2004-06-01), Takahashi et al.
patent: 9-22120 (1997-01-01), None

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