Exposure apparatus

Details Exposure apparatus Exposure apparatus

1996-03-12

1998-10-20

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, 414416, G03B 2758, G03B 2742, B65B 2102

Patent

active

058254706

ABSTRACT:
Disclosed is an exposure apparatus comprising a substrate holder washing unit and a substrate holder storing unit. While a substrate holder exported from an exposure stage is washed in the washing unit, a clean holder previously stored in the storing unit is transported to an X stage by using a robot hand and a transport arm, and it is installed to the X stage by using an attaching/detaching mechanism. The holder can be always maintained in a clean state without stopping the apparatus for a long period of time, resulting in improvement in throughput. Also disclosed is an exposure apparatus comprising a mechanism for cleaning a substrate holder by transporting a whetstone onto the holder, engaging the whetstone with an engaging member, and rotating the whetstone by using a rotary driving unit. The exposure apparatus is provided with a unit for drawing dust emerged upon cleaning with the whetstone.

REFERENCES:
patent: 4775877 (1988-10-01), Kosugi et al.
patent: 4923054 (1990-05-01), Ohtani et al.
patent: 5100502 (1992-03-01), Murdoch et al.
patent: 5301700 (1994-04-01), Kamikawa et al.
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5664254 (1997-09-01), Ohkura et al.
patent: 5677758 (1997-10-01), McEachern et al.

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