Photocopying – Projection printing and copying cameras – Methods
Patent
1993-05-11
1994-07-26
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Methods
355 53, G03B 2732, G03B 2742
Patent
active
053330358
ABSTRACT:
An exposing method utilizing an exposure apparatus provided with an illuminating optical system and a projection optical system, wherein the illuminating optical system is adapted to illuminate a mask from an inclined direction with a predetermined incident angle, and the mask is provided with a periodic pattern composed of opaque portions and transparent portions narrower than the opaque portions, and wherein the projection optical system is adapted to form an image of the pattern on an object of exposure, coated with a photosensitive material subjected to a surface insolubilizing treatment, the exposing method comprising:
a first step of illuminating the periodic pattern by a light beam passing through an area eccentric from and not including the optical axis of the illuminating optical system on a Fourier transformation plane of the periodic pattern or a conjugate plate thereof in the illuminating optical system; and
a second step for causing a relative displacement or a relative vibration between the image of the periodic pattern and the object of exposure in the axial direction of the projection optical system, during the illumination of the periodic pattern in the first step.
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Naomasa Shiraishi et al, "New Imaging Technique for 64M-DRAM", SPIE vol. 1674 Optical/Laser Microlithography V, Mar. 11-13, 1992 pp. 741-752.
Nikon Corporation
Wintercorn Richard A.
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