Exposing apparatus and method

Details Exposing apparatus and method Exposing apparatus and method

1998-11-20

2000-12-12

Adams, Russell

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 430 5, 430 20, G03B 2742, G03B 2754, G03F 900, C09K 1900

Patent

active

061606111

ABSTRACT:
According to an exposing apparatus and an exposing method of the present invention, a photomask is provided with linear patterns having their linear portions to be transferred onto a plate reduced in length. By moving and stopping photomask in one direction of plate and directing light to photomask, the linear patterns are transferred onto plate. Thus, the exposing apparatus and method are provided capable of efficiently transferring the linear patterns onto the plate by exposure using a small photomask.

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patent: 5736300 (1998-04-01), Mizuno et al.
patent: 5912727 (1999-06-01), Kawai
patent: 5966201 (1999-10-01), Shiraishi et al.

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