Exposed pad backside pressure sensor package

Details Exposed pad backside pressure sensor package Exposed pad backside pressure sensor package

2011-03-08

2011-03-08

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Mounting and connection

Reexamination Certificate

active

07900521

ABSTRACT:
A method and apparatus are described for fabricating an exposed backside pressure sensor (30) which protects interior electrical components (37) formed on a topside surface of a pressure sensor transducer die (31) from corrosive particles using a protective gel layer (38) and molding compound (39), but which vents a piezoresistive transducer sensor diaphragm (33) formed on a backside of the pressure sensor transducer die (31) through a vent hole (42) formed in an exposed die flag (36), enabling the sensor diaphragm (33) to directly sense pressure variations without the influence of a protective gel.

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