Exposed conductor system and method for sensing an electron...

Details Exposed conductor system and method for sensing an electron... Exposed conductor system and method for sensing an electron...

2005-10-26

2008-05-20

Nguyen, Kiet T. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S492300

Reexamination Certificate

active

07375345

ABSTRACT:
A detector is disclosed for sensing an intensity of an electron beam generated along a path. An exemplary detector includes an exposed conductor attached to a support which is configured to locate the exposed conductor within a path of an electron beam; a grounded conductor isolated from the exposed conductor, the grounded conductor partly surrounding the exposed conductor to form a plasma shield having a window positioned at least in a direction of the electron beam path.

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