Stock material or miscellaneous articles – All metal or with adjacent metals – Foil or filament smaller than 6 mils
Patent
1987-04-17
1988-11-08
Roy, Upendra
Stock material or miscellaneous articles
All metal or with adjacent metals
Foil or filament smaller than 6 mils
340565, 428635, 428641, 437192, 437194, 437200, 148DIG140, 148DIG147, H01L 2140, H01L 2190, C23C 1104
Patent
active
047833793
ABSTRACT:
The present invention provides a film comprising alternate layers of a metal such as zirconium and silicon. The film has a critical temperature at which the film can undergo explosive crystallization. The film undergoes explosive crystallization upon subjecting the film to an energy impulse at temperature equal to or greater than the critical temperature.
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Floro, "Propagation of Explosive Crystallization in Thin Rh-Si Multilayer Films" J. Vac. Sci. Techno. A 4(3), 631 (1986).
Poole John E.
Wickersham Charles E.
Roy Upendra
Tosoh SMD, Inc.
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