Exhaust valve for semiconductor manufacturing process

Details Exhaust valve for semiconductor manufacturing process Exhaust valve for semiconductor manufacturing process

2006-01-03

2006-01-03

Fox, John (Department: 3753)

Fluid handling

Systems

Multi-way valve unit

C137S375000

Reexamination Certificate

active

06981521

ABSTRACT:
The Invention relates to an exhaust valve for a semiconductor manufacturing process, which can improve sealability of the exhaust valve, prevent leakage of exhaust gas, and increase the cleaning period, more concretely, The exhaust valve includes a valve body having a chamber formed at the center thereof; a rotary cylinder rotatably coupled to the chamber of the valve body; a protective cover coupled to the outer circumferential surface of the rotary cylinder; an exhaust guide member coupled to the lower portion of the valve body; an adapter seated on the upper portion of the valve body and surrounding the shaft portion of the rotary cylinder; an actuator coupled to the upper portion of the adapter for rotating the rotary cylinder; and sensing means mounted at the upper portion of the valve body, wherein a first sealing member is mounted between the rotary cylinder and the protective cover.

REFERENCES:
patent: 2471941 (1949-05-01), Downey
patent: 3498317 (1970-03-01), Duffey
patent: 3960167 (1976-06-01), Ros

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