Gas separation – Plural serial basically diverse separating media
Reexamination Certificate
2009-05-05
2011-11-15
Hopkins, Robert A (Department: 1776)
Gas separation
Plural serial basically diverse separating media
C055S385200, C055S446000
Reexamination Certificate
active
08057564
ABSTRACT:
Three exhaust trap units are arranged in series in an exhaust trap device for trapping substances solidified from exhaust gas and exhaust gas paths are formed inside the exhaust trap units. One or more collision plates are placed in each trap unit. The collision plates in each of the two upstream side exhaust trap units are arranged such that a space extending in the axial direction of the exhaust path is present therein without being blocked by any of the collision plates. The collision plates in the downstream side exhaust trap unit are arranged such that such a space is not present. Uneven distribution of the amount of accumulation of solidified substances is suppressed without performing complex control, and outflow of the solidified components to the downstream side of the exhaust trap device can be reliably reduced.
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Hopkins Robert A
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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