Exhaust system for a vapor deposition chamber

Details Exhaust system for a vapor deposition chamber Exhaust system for a vapor deposition chamber

1982-04-26

1984-03-06

Nozick, Bernard

Glass manufacturing

Processes

Forming product or preform from molten glass

65 13, 65 182, 65144, 55 1, 55441, 138 44, C03C 2502

Patent

active

044351992

ABSTRACT:
An exhaust system (3) for a vapor-phase axial deposition (VAD) system (5) is comprised of the serial combination of an exhaust tube (26), an outlet pipe (27), a soot collection chamber (32) and a discharge line (34). The exhaust tube (26) has a constricted central portion (48) and a flared intake (44) with a gradually turned back end (46).

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