Fluid handling – Processes – Involving pressure control
Reexamination Certificate
2008-01-08
2008-01-08
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Processes
Involving pressure control
C137S854000, C251S337000
Reexamination Certificate
active
07316240
ABSTRACT:
An exhaust system and a mini-exhaust static pressure controlling apparatus thereof for controlling a process area. The mini-exhaust static pressure controlling apparatus has an exhaust chamber and an auto release damping device. The exhaust chamber has an air inlet connected to the process area receiving air exhaust from the process area, and an air outlet venting the air exhaust. The auto release damping device has a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device for applying a stress on the diaphragm to maintain the arc shape of the diaphragm, and is disposed on the exhaust chamber to control static pressure of the air exhaust in the exhaust chamber.
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Chen Yung-Dar
Kuo Dar-Rung
Kuo Po-Sung
Wang Ming-Tsong
Wen Ming-chien
Birch & Stewart Kolasch & Birch, LLP
Krishnamurthy Ramesh
Taiwan Semiconductor Manufacturing Co. Ltd.
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