Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate
2008-12-31
2010-11-23
Look, Edward (Department: 3745)
Rotary kinetic fluid motors or pumps
Smooth runner surface for working fluid frictional contact
C415S121200
Reexamination Certificate
active
07837432
ABSTRACT:
An exhausting system and an exhausting pump connected to a processing chamber of a substrate processing apparatus are provided. The exhausting pump is provided with at least one rotary blade and a cylindrical intake part disposed at the processing chamber side from the rotary blade. The exhausting pump includes a reflecting device disposed inside the intake part and having at least one reflecting surface oriented to the rotary blade.
REFERENCES:
patent: 5709528 (1998-01-01), Hablanian
patent: 2002/0126269 (2002-09-01), Sato
patent: 2003/0198741 (2003-10-01), Uchida et al.
Shintaro Sato, et al., “Visualization of Backflow Particles from Turbo Molecular Pump”, Clean Technology, May 31, 2003, pp. 20-23 (with English translation).
Kobayashi Yoshiyuki
Moriya Tsuyoshi
Murakami Takahiro
Sato Tetsuji
Ellis Ryan H
Look Edward
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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