Exhaust shroud and skirt apparatus and method

Details Exhaust shroud and skirt apparatus and method Exhaust shroud and skirt apparatus and method

1995-03-28

1997-10-28

Joyce, Harold

Ventilation

Clean room

454184, H05K 720

Patent

active

056812191

ABSTRACT:
An apparatus and method for removing particles and reducing temperature within an equipment unit, such as a photolithography stepper unit. The equipment unit is located in a clean room environment. The clean room environment contains environmental gases and is defined by four walls, a floor, and a ceiling. At least one of the four walls is hollow forming an air chase. Outside air is circulated in the air chase. A hole in the wall containing the air chase allows communication between the clean room environment and the air chase. A skirt is connected to the equipment unit and the floor, and a shroud is connected to the skirt, the floor, and the hole. The skirt and the shroud substantially seal the equipment unit with the hole to allow environmental gases within the equipment unit to be drawn within the equipment unit to the air chase.

Affiliated with

Also associated with

Rating

Exhaust shroud and skirt apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exhaust shroud and skirt apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exhaust shroud and skirt apparatus and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1022109