Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1979-10-29
1981-01-13
Williams, Howard S.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204195S, C23C 1500
Patent
active
042447984
ABSTRACT:
A method of sputtering a platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor. Porous high surface area platinum films are deposited that have more consistent properties. A platinum target is spaced about 3.0-4.5 cm from the thimble and more than 6 cm from the sputtering anode. A pressure of about 10-20 millitorr is used during sputtering at a DC power of about 13-22 watts/cm.sup.2 of target area.
REFERENCES:
patent: 3844920 (1974-10-01), Burgett et al.
patent: 3978006 (1976-08-01), Topp et al.
patent: 4021326 (1977-03-01), Pollner et al.
patent: 4116883 (1978-09-01), Rhodes
patent: 4129848 (1978-12-01), Frank et al.
patent: 4136000 (1979-01-01), Davis et al.
Gold Terry J.
Kennard III Frederick L.
Kikuchi Paul C.
Wilhelm, Jr. Ralph V.
General Motors Corporation
Leader William
Wallace Robert J.
Williams Howard S.
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