Exhaust electrode process for exhaust gas oxygen sensor

Details Exhaust electrode process for exhaust gas oxygen sensor Exhaust electrode process for exhaust gas oxygen sensor

1980-09-22

1981-12-01

Gantz, Delbert E.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192SP, 204195S, C23C 1500

Patent

active

043034900

ABSTRACT:
A method of sputtering a palladium or palladium-platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor. Porous high surface area films are deposited that have more consistent properties. A sputtering target is spaced about 3.0-4.5 cm from the thimble and more than 6 cm from the sputtering anode. A pressure of about 10-20 millitorr is used during sputtering at a DC power of about 13-22 watts/cm.sup.2 of target area.

REFERENCES:
patent: 3844920 (1974-10-01), Burgett et al.
patent: 3978006 (1976-08-01), Topp et al.
patent: 4021326 (1977-03-01), Pollner et al.
patent: 4116883 (1978-09-01), Rhodes
patent: 4129848 (1978-12-01), Frank et al.
patent: 4136000 (1979-01-01), Davis et al.

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