Exhaust apparatus with vacuum pump

Details Exhaust apparatus with vacuum pump Exhaust apparatus with vacuum pump

1993-02-01

1994-07-05

Bertsch, Richard A.

Pumps

Electrical or getter type

417 49, H01J 4114, H01J 4118

Patent

active

053262271

ABSTRACT:
An exhaust apparatus and a high vacuum pumping unit including a high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted. In the high vacuum pumping unit, those gas molecules are diffused back or released from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

REFERENCES:
patent: 2460175 (1949-01-01), Hergenrother
patent: 2893624 (1959-07-01), Fricke
patent: 3100274 (1963-08-01), Luftman et al.

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