Exhaust apparatus, semiconductor device manufacturing system...

Details Exhaust apparatus, semiconductor device manufacturing system... Exhaust apparatus, semiconductor device manufacturing system...

2005-06-21

2005-06-21

Barr, Michael (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C137S240000, C251S305000

Reexamination Certificate

active

06907892

ABSTRACT:
In an exhaust pipe, a rotating shaft takeoff connection is provided so as to support a rotating shaft for rotating a switching valve fixed thereon. The rotating shaft extends to the outside of the exhaust pipe and is provided with an introduction hole and branch holes in such a manner that the introduction hole and the branch holes are communicated with each other to form through holes extending from the outside to the inside of the exhaust pipe. Into a gap between the rotating shaft takeoff connection and the rotating shaft, purge gas is introduced via the introduction hole and the branch holes. Furthermore, pure water is introduced into the gap via the introduction hole and the branch holes. By utilizing the purge gas, exhaust gas within the exhaust pipe is prevented from leaking outside the pipe and by utilizing the pure water, accumulated solid substance are prevented from adhering to the related parts of the pipe.

REFERENCES:
patent: 4353388 (1982-10-01), Isoyama et al.
patent: 2-39531 (1990-02-01), None
patent: 6-163494 (1994-06-01), None
patent: 10-288276 (1998-10-01), None

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