Gas separation: apparatus – Solid sorbent apparatus – Plural diverse separating means
Patent
1992-07-30
1993-10-05
Hart, Charles
Gas separation: apparatus
Solid sorbent apparatus
Plural diverse separating means
55DIG46, 118715, B01D 5304
Patent
active
052500926
ABSTRACT:
An exhaust apparatus for an epitaxial growth system includes an exhaust pipe, a dust filter, and a liquid nitrogen trap. The exhaust pipe performs exhaustion of a reaction furnace in which a reaction gas is supplied to grow a thin film on a semiconductor wafer. The dust filter traps reaction products which have not been used for growing the thin film on the semiconductor wafer, and the dust filter is arranged in the exhaust pipe. The liquid nitrogen trap is arranged in the exhaust pipe in series with the dust filter.
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Hart Charles
NEC Corporation
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