Exhaust apparatus and vacuum pumping unit including the exhaust

Details Exhaust apparatus and vacuum pumping unit including the exhaust Exhaust apparatus and vacuum pumping unit including the exhaust

1992-02-12

1993-08-31

Bertsch, Richard A.

Pumps

Electrical or getter type

417 49, H01J 4114, H01J 4118

Patent

active

052403815

ABSTRACT:
An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

REFERENCES:
patent: 2460175 (1949-01-01), Hergenrother
patent: 2578009 (1951-12-01), Linder
patent: 2636664 (1953-04-01), Hertzler
patent: 3107044 (1963-10-01), Brubaker et al.
patent: 3249291 (1966-05-01), Ackley
Journal of Applied Physics, vol. 32, No. 3, pp. 424-434, Mar. 1961.

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