Exhaust apparatus and vacuum pumping unit including the exhaust

Details Exhaust apparatus and vacuum pumping unit including the exhaust Exhaust apparatus and vacuum pumping unit including the exhaust

1994-03-25

1996-01-02

Bertsch, Richard A.

Pumps

Electrical or getter type

417 49, 417 50, F04B 3702, F04F 1100

Patent

active

054802865

ABSTRACT:
An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

REFERENCES:
patent: 2578009 (1951-12-01), Linder
patent: 3292844 (1966-12-01), MacKenzie
patent: 3535055 (1970-10-01), Brubaker et al.
patent: 3601503 (1971-08-01), Snouse
Journal of Applied Physics, vol. 32, No. 3, pp. 424-434, Mar. 1961.

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