Excitation system for a fast pulsed discharge

Coherent light generators – Particular pumping means – Electrical

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572 87, H01S 309

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043653375

ABSTRACT:
Excitation system for fast pulsed discharge with excitation by a highly homogeneous arc-free capacitor-discharge in a gas space between and defined by at least two electrodes of a laser chamber, the two electrodes being spaced from one another and extending parallel to the optical axis of the laser, and with first and second stripline capacitors for induction-free energy-storage and for contacting the laser electrodes and electrodes of a fast high-voltage switching gap associated therewith, respectively, includes a plurality of electrodes forming part of the first and the second stripline capacitors, a plurality of dielectric layers disposed between the capacitor electrodes, the dielectric layers and the capacitor electrodes extending substantially normally to the optical axis of the laser and being stacked substantially parallel to the optical axis of the laser in a capacitor stack, and laterally extending connecting lugs connecting the capacitor electrodes to the electrodes of the laser chamber.

REFERENCES:
patent: 3795874 (1974-03-01), Pan et al.
patent: 4039971 (1977-08-01), Wang et al.
patent: 4093927 (1978-06-01), Levine
"Folder Parallel-Plate N.sub.2 Laser" Lot et al; IBM Technical Bulletin, vol. 18, No. 3, Aug. 1975.
"Miniaturized Atmospheric Pressure Nitrogen Laser" vonBergmann et al., Jour. of Physics E: Scientific Inst. 1977, vol. 10, 1977.
Ultraviolet-preionized discharge-pumped lasers in XeF, KrF and ArF by Burnham et al., App. Phys. Lett., vol. 29, Noll, 1 Dec. 76, pp. 707-709.

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