Excitation in micromechanical devices

Details Excitation in micromechanical devices Excitation in micromechanical devices

2006-10-06

2008-10-07

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S514150

Reexamination Certificate

active

07430908

ABSTRACT:
A resonant structure for a micromechanical device includes a beam and at least one mass attached to the beam. The resonant structure is arranged to have a predominantly rotational excitation mode and an excitation plane in which motion of the excited resonant structure predominantly takes place, the at least one mass including a geometry such that none of the principal axes of the rotational inertia tensor of the resonant structure are normal to the excitation plane.

REFERENCES:
patent: 4732647 (1988-03-01), Aine
patent: 5203208 (1993-04-01), Bernstein
patent: 6032531 (2000-03-01), Roszhart
patent: 6584845 (2003-07-01), Gutierrez et al.
patent: 2003/0196490 (2003-10-01), Cardarelli
patent: 4228795 (1994-03-01), None

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