Excimer lasers

Details Excimer lasers Excimer lasers

1987-12-15

1989-04-18

Sikes, William L.

Coherent light generators

Particular active media

Gas

372 11, 372 20, 372 32, H01S 310

Patent

active

048233544

ABSTRACT:
In an excimer laser system with wavelength bandwidth narrowing, a feedback loop for monitoring and correcting the tuning of the laser employs a wavelength calibration device in the form of a gas with an absorption peak at the desired narrow wavelength. A portion of the laser output received through the gas provides the information for generating the correction signal.

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