Excimer laser with improved window mount

Details Excimer laser with improved window mount Excimer laser with improved window mount

1999-03-08

2000-05-30

Scott, Jr., Leon

Coherent light generators

Particular resonant cavity

Specified cavity component

372 57, 372 59, 372 10, H01S 308

Patent

active

060699094

ABSTRACT:
An improved excimer laser is disclosed. In one embodiment, the laser includes laser beam generating circuitry operable to generate a laser beam and a vessel enclosing the laser beam generating circuitry. The vessel contains a volume of gas conducive to the formation of the laser beam by the laser beam generating circuitry. The vessel has a wall with a beam aperture formed therein to permit the laser beam generated by the laser beam generating circuitry to pass through it. A window mount assembly is attached to the wall of the vessel. The window mount assembly encloses a beam cavity and has a window that transmits the laser beam. The window is positioned at a first, closed end of the beam cavity. The beam cavity has a second, open end adjoining the beam aperture formed in the vessel wall. The beam cavity has a lateral surface extending between the first and second ends. A plenum lies outside the beam cavity. A gas handling system extracts the gas from the vessel and provides the gas to the plenum. A slot formed in the window mount assembly extends between the plenum and the lateral surface of the beam cavity. The slot forms a gas inlet aperture in the lateral surface of the beam cavity proximate to the first end of the beam cavity. The slot provides a flow of gas from the plenum to the beam cavity.

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