Excimer laser with hydrogen chloride and method for producing hy

Details Excimer laser with hydrogen chloride and method for producing hy Excimer laser with hydrogen chloride and method for producing hy

1991-11-19

1993-06-15

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 59, H01S 322

Patent

active

052205746

ABSTRACT:
An excimer laser having a chamber (10) in which a gas-discharge is performed with participation of hydrogen-chloride comprises means with which the hydrogen chloride is formed by hydrolysis.

REFERENCES:
patent: 4958356 (1990-09-01), Tanuma
R. Salimbeni et al., "XeC1 Laser Operation With Liquid Chlorine Donors: an Experimental Investigation on the Gas Composition," 39 Optics Communications 75-78 (1981).
Pummer, H, et al., "Kommerzielle Excimerlaser," Laswer-Anwendung, Exhibit of Laser and Optoelektronic of May 3, 1985.

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