Excimer laser with greater spectral bandwidth and beam stability

Details Excimer laser with greater spectral bandwidth and beam stability Excimer laser with greater spectral bandwidth and beam stability

1997-01-21

1999-04-27

Scott, Jr., Leon

Coherent light generators

Particular resonant cavity

Specified cavity component

372 25, 372 57, 372103, 372 34, H01S 308

Patent

active

058987258

ABSTRACT:
An excimer laser having reduced spectral bandwidth variation is provided. The laser has an assembly of components comprising a beam expander having at least two prisms that reduces the spectral bandwidth of the laser beam that is passed through the assembly. At least one of the prisms of the beam expander is made of a thermally stable material, wherein the material has an coefficient of absorption of no more than about 0.1 percent/cm for light having the desired wavelength, a rate of change of refractive index with temperature of no more than about 2.3.times.10.sup.-6 .degree.C..sup.-1, a thermal conductivity of at least about 9.71 W/m-.degree.C. at 20 deg C., and/or a coefficient of thermal expansion of at least about 9.times.10.sup.-6 (deg C.).sup.-1. In a preferred embodiment, the stability of beam profile is improved, the variation in spectral bandwidth of the beam from the laser is reduced, the spectral bandwidth itself is also reduced, and the laser exhibits greater voltage stability.

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patent: 5596596 (1997-01-01), Wakabayashi et al.
patent: 5761236 (1998-06-01), Kleinschmidt et al.

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